This book describes the developmental history of the vacuum system of the transmission electron microscope (TEM) at the Japan Electron Optics Laboratory (JEOL) from its inception to its use in today’s high-technology microscopes. The author and his colleagues were engaged in developing vacuum technology for electron microscopes (JEM series) at JEOL for many years. This volume presents a summary and explanation of their work and the technology that makes possible a clean ultrahigh vacuum.