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Plasma Sources for Thin Film Deposition and Etching
Barnes and Noble
Plasma Sources for Thin Film Deposition and Etching
Current price: $72.95
Barnes and Noble
Plasma Sources for Thin Film Deposition and Etching
Current price: $72.95
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This latest volume of the well-known
Physics of Thin Films
Series includes four chapters that discuss high-density plasma sources for materials processing, electron cyclotron resonance and its uses, unbalancedmagnetron sputtering, and particle formation in thin film processing plasma.
Physics of Thin Films
Series includes four chapters that discuss high-density plasma sources for materials processing, electron cyclotron resonance and its uses, unbalancedmagnetron sputtering, and particle formation in thin film processing plasma.
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