The second edition has been edited and rewritten throughout with the following particular areas being expanded or added: - piezoelectric actuators; - fine movement control; - gantry-stage control; - interpolation of quadrature encoder signals; - geometrical error modelling for single-, dual- and general-XY-axis stages. By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter, accessible to a broad base of readers, ranging from academics to practitioners, is provided.